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Laser Scanning Microscopy (Scanning Laser Microscopy) is a test/experiment method where a laser (or perhaps other photon sources) is focused and scanned across a sample (usually a thin film of material) and the response is measured. This response can be emitted photons, or electrical in nature such as a voltage. The idea is to localize any defect or damage to the material. It is similar, though much more basic, in operation to Confocal Laser Scanning Microscopy, but completely different in the data collected.
This method is popular among failure analysis engineering laboratories, as well as materials science laboratories where new films need to be tested for homogeneity. Many commercial stand-alone LSM systems now exist for purchase.