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Summary
| Description | A mere widening of a power rail feature (top and bottom of sampled pattern) is enough to drastically change the optimized pupil shape as well as degrade the range of best focus at different points in the 32 nm target pitch pattern, even with the use of assist features. Ref.: T. Last et al., Proc. SPIE 10143, 1014311 (2017). |
| Date | |
| Source | PowerPoint |
| Author | Guiding light |
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Licensing
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Original upload log
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| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2017-06-12 01:25:15 | 884 × 306 | Guiding light | Correct label colors |
| 2017-06-06 13:10:34 | 1006 × 345 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 16:00, 2 April 2020 | | 884 × 306 (28 KB) | Hippymoose17 | Transferred from en.wikipedia (MTC!) (1.1.0) |
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