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Summary
| Description |
English: The best focus varies as a strong function of pitch under the same (quasar) illumination (0.33 NA). At 36 nm pitch, horizontal and vertical darkfield features have more than 30 nm difference of focus. The 34 nm pitch and 48 nm pitch features have the largest difference of best focus regardless of feature type. |
| Date | |
| Source | public domain, IMEC EUVL 2018 Workshop: https://www.euvlitho.com/2018/P62.pdf |
| Author | Guiding light |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-07-27 19:42:45 | 907 × 581 | Guiding light | New information |
| 2017-05-04 12:55:13 | 1079 × 458 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 04:05, 15 December 2018 | | 907 × 581 (258 KB) | OgreBot | (BOT): Reverting to most recent version before archival |
| 04:05, 15 December 2018 |  | 1,079 × 458 (32 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-04 12:55:13 by Guiding light | |
| 03:29, 15 December 2018 |  | 907 × 581 (258 KB) | I love rpgs | Transferred from en.wikipedia (MTC!) (1.1.0) |
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