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Summary
| Description | 22 nm contact LCDU (3 sigma) is plotted as a function of pitch for quasar illumination. For pitches around 60 nm, the uniformity is degraded, while for pitches around 40 nm, the uniformity is minimized. Dose is 46 mJ/cm2. Ref.: {P. De Bisschop, J. Micro/Nanolith. MEMS MOEMS 16, 041013 (2017). |
| Date | |
| Source | Excel |
| Author | Guiding light |
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log
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| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-02-12 14:28:47 | 481 × 291 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 15:54, 2 April 2020 | | 481 × 291 (10 KB) | Hippymoose17 | Transferred from en.wikipedia (MTC!) (1.1.0) |
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