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Summary
| Description |
English: Local CD uniformity for 26 nm contact holes exposed by EUV at different doses, taking out field and position effects. The correlation points to shot noise effect.
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| Date | |
| Source | Paint editor |
| Author | Guiding light |
Licensing
Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2014-11-14 12:21 | 669×397× (19079 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 10:11, 28 February 2016 | | 669 × 397 (19 KB) | FastilyClone | Transferred from enwp |
File usage
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