File:Image shift vs illumination pole.png

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Summary

Description
English: The image shifts in positive y direction as the illumination tilts more in positive y direction. [1][2]
Date
Source Own work
Author Guiding light

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Reference

  1. Double Diffraction Model of EUV Masks
  2. Pattern Shifts Induced by Dipole-Illuminated EUV Masks

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27 September 2021

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Date/TimeThumbnailDimensionsUserComment
current20:44, 26 September 2021Thumbnail for version as of 20:44, 26 September 20211,129 × 606 (67 KB)Guiding lightUploaded own work with UploadWizard
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