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Summary
| Description |
English: Left: Example of a 2D pattern with critical dimensions in both x (Mx) and y (Sy). Right: Different illumination shapes within the pupil (represented by the outer circle). One dimension requires a different illumination from the other due to different pitches in x and y. For k1<0.5, these illuminations (indicated by different color patches) may be exclusive, while for k1>0.5, they may overlap, allowing a conventional illumination shape (indicated by the dotted circle) to be used. |
| Date | |
| Source | PowerPoint drawing |
| Author | Guiding light |
Licensing
User:Guiding light, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
Attribution: User:Guiding light
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Original upload log
Transferred from en.wikipedia to Commons using For the Common Good.
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 22:02, 21 June 2018 | 865 × 574 (23,497 bytes) | w:en:Guiding light (talk | contribs) | |
| 02:51, 17 June 2018 | 865 × 569 (22,010 bytes) | w:en:Guiding light (talk | contribs) | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 23:55, 29 September 2018 | | 865 × 574 (23 KB) | OgreBot | (BOT): Reverting to most recent version before archival |
| 23:55, 29 September 2018 |  | 865 × 569 (21 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-06-17 02:51:54 by Guiding light | |
| 00:41, 28 September 2018 |  | 865 × 574 (23 KB) | Arlene the bean | Transferred from en.wikipedia: see original upload log above |
File usage
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