File:26 nm pitch vs 52 nm pitch with obscuration.png

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English: The obscuration removes most or all of the light in the central diffraction order. In the case of 52 nm x 52 nm pitch, this results in the apparent pitch halving in the diagonal direction.[1][2][3]
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Author Guiding light

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References

  1. B. Bilski et al., Proc. SPIE 11177, 111770I (2019).
  2. B. Kneer et al., Proc. SPIE 9422, 94221G (2015).
  3. Idiosyncrasies of Obstructed High NA EUV Imaging

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21 November 2021

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