Talk:X-ray lithography

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Reboot edit

Latest comment: 14 years ago1 comment1 person in discussion

This talk page contained great technical information that looks like it was meant for the article, so I moved it. I also emptied out this page, so it could be used for discussions, and added an Engineering project banner.

Michael.Forman (talk) 06:01, 30 June 2009 (UTC)Reply

Questions and comments edit

Latest comment: 12 years ago1 comment1 person in discussion

How can you use a diffractive lens with a synchrotron radiation source that isn't monochromatic?

I sort of understand the explanation of demagnification. It is only in the center that the whole aperture is coherent. But the contrast appears to be very poor, assuming the aperture is at least several wavelengths wide.

There must be a local positive charge from the electrons knocked out of the center? Should one add something like poly acetylene to equalize the charge faster?

The Extreme ultraviolet lithography article covers most of the same subjects but reads very differently.

David R. Ingham (talk) 00:49, 22 January 2012 (UTC)Reply

Monochromatic X-rays edit

The best X-ray sources are free electron lasers. Possibly an improvement on the usual X-ray machines is fluorescence induced by light ions in the MeV range. The advantage is not having the bremsstrahlung.

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