David Attwood is an American physicist and professor emeritus at the University of California, Berkeley, where he worked in the field of synchrotron radiation[1] and free-electron lasers, developing X-ray microscopy[2] techniques for research and for the industry (EUV lithography[3]). He is the author of a reference book on soft X-rays and extreme ultraviolet radiation.[4]
David T. Attwood | |
|---|---|
| Alma mater | New York University |
| Known for | X-ray optics EUV lithography |
| Scientific career | |
| Institutions | UC Berkeley Lawrence Berkeley National Laboratory |
Education and career edit
David Attwood received his Ph.D. in Applied Physics from New York University in 1972.[5] After his Ph.D, he joined Lawrence Livermore National Laboratory to work on laser fusion.[6] He was the first scientific director of the Advanced Light Source (1985–1988) and the founding director of the Center for X-Ray Optics at Lawrence Berkeley National Laboratory, where he pioneered EUV lithography. He co-founded the Applied Science and Technology (AS&T) program within the college of engineering at UC Berkeley and supervised over twenty grad students,[7] among who Regina Soufli and Anne Sakdinawat. He is a Fellow of the American Physical Society.
References edit
- ^ Attwood, D.; Halbach, K.; Kim, K.-J. (1985). "Tunable Coherent X-rays". Science. 228 (4705): 1265–1272. doi:10.1126/science.228.4705.1265. PMID 17799101. S2CID 27975164.
- ^ Chao, Weilun; Harteneck, Bruce D.; Liddle, J. Alexander; Anderson, Erik H.; Attwood, David T. (2005). "Soft X-ray microscopy at a spatial resolution better than 15 nm". Nature. 435 (7046): 1210–1213. doi:10.1038/nature03719. PMID 15988520. S2CID 4314046.
- ^ Gwyn, C. W. (1998). "Extreme ultraviolet lithography". Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 16 (6): 3142. doi:10.1116/1.590453.
- ^ Attwood, David (1999). Soft X-Rays and Extreme Ultraviolet Radiation. Cambridge University Press Press. ISBN 9781139164429.
- ^ David Attwood – Department of Electrical Engineering and Computer Sciences at UC Berkeley
- ^ Attwood, D. T. (May 19, 1978). "Diagnostics for the laser fusion program: plasma physics on the scale of microns and picoseconds". OSTI 6683562 – via www.osti.gov.
- ^ David Attwood – UC Berkeley
External links edit
- David Attwood publications indexed by Google Scholar