File:Line T2T vs half-pitch (EUV).png

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Summary

DescriptionLine T2T vs half-pitch (EUV).png	English: The smallest published T2T is plotted vs. half pitch. EUV OPC is applied where possible to reduce the tip-to-tip distance. The dotted line indicates the half-pitch. Thus, tip-to-tip distance generally exceeds the half-pitch except for the very largest half-pitch shown (32 nm). Refs.: (except SMO) E. van Setten et al., Intl. Symp. on EUV Lithography, 2014, and E. van Setten et al., Proc. SPIE 9231, 923108 (2014); (SMO) V. M. Blanco Carballo et al., Proc. SPIE 10143, 1014318 (2017).
Date	3 July 2017
Source	This diagram was created with Microsoft Excel.
Author	Guiding light

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Date/Time	Dimensions	User	Comment
2017-07-04 12:34:04	481 × 288	Guiding light
2017-07-04 12:13:36	481 × 288	Guiding light	more cases
2017-07-04 12:07:26	481 × 288	Guiding light
2017-07-03 14:40:39	481 × 288	Guiding light
2017-07-03 12:29:45	481 × 288	Guiding light
2017-07-03 12:21:14	481 × 288	Guiding light	Uploading a self-made file using [[Wikipedia:File_Upload_Wizard\|File Upload Wizard]]

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File history

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	Date/Time	Dimensions	User	Comment
current	21:25, 20 August 2019	481 × 288 (10 KB)	OgreBot	(BOT): Reverting to most recent version before archival
	21:25, 20 August 2019	481 × 288 (11 KB)	OgreBot	(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-04 12:13:36 by Guiding light
	21:25, 20 August 2019	481 × 288 (9 KB)	OgreBot	(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-04 12:07:26 by Guiding light
	21:25, 20 August 2019	481 × 288 (8 KB)	OgreBot	(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-03 14:40:39 by Guiding light
	21:25, 20 August 2019	481 × 288 (9 KB)	OgreBot	(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-03 12:29:45 by Guiding light
	21:25, 20 August 2019	481 × 288 (8 KB)	OgreBot	(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-03 12:21:14 by Guiding light
	16:30, 20 August 2019	481 × 288 (10 KB)	Dave louis john	Transferred from en.wikipedia (MTC!) (1.1.0)