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Summary
| Description |
English: A feature on an EUV mask can easily be considered optically thick, when the width is comparable to the thickness (e.g., 70 nm). In such a case, the shadow distance can be a substantial portion of the linewidth or critical dimension (CD). |
| Date | |
| Source |
.svg){kind=small} This presentation was created with Microsoft PowerPoint. |
| Author | Guiding light |
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This pcb image could be re-created using vector graphics as an SVG file. This has several advantages; see Commons:Media for cleanup for more information. If an SVG form of this image is available, please upload it and afterwards replace this template with
{{vector version available|new image name}}.
It is recommended to name the SVG file “EUV thick mask.svg”—then the template Vector version available (or Vva) does not need the new image name parameter. |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-09-19 04:17:20 | 585 × 220 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 16:31, 20 August 2019 | | 585 × 220 (4 KB) | Dave louis john | Transferred from en.wikipedia (MTC!) (1.1.0) |
File usage
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