No higher resolution available.
EUV_defect_probability_vs_pitch.png (481 × 265 pixels, file size: 12 KB, MIME type: image/png)
 | This is a file from the Wikimedia Commons. Information from its description page there is shown below. Commons is a freely licensed media file repository. You can help. |
Summary
| Description |
English: The probability of a microbridge defect occurring within a printed metal line generally increases for smaller half-pitch (hp), but increases with pitch at a given width. Ref.:https://www.linkedin.com/pulse/cd-pitch-combinations-disfavored-euv-stochastics-frederick-chen |
| Date | |
| Source | Excel drawing |
| Author | Guiding light |
Licensing
I, the copyright holder of this work, hereby publish it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:24, 21 November 2020 | | 481 × 265 (12 KB) | Guiding light | Uploading a self-made file using File Upload Wizard |
File usage
No pages on the English Wikipedia use this file (pages on other projects are not listed).
